MECHANICAL COUPLING IN SINGLE CRYSTAL SILICON FOR MEMS DESIGN

Govindjee, Sanjay and Klinkel, Sven (2005) MECHANICAL COUPLING IN SINGLE CRYSTAL SILICON FOR MEMS DESIGN. Journal of MIcroelectromechanical systems, 14 (04). ISSN 1057-7157

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Official URL: http://library.binus.ac.id/Collections/journal_det...
Item Type: Article
Additional Information: 9_Volume 14 / Nomor 04 / August 2005_MECHANICAL COUPLING IN SINGLE CRYSTAL SILICON FOR MEMS DESIGN
Subjects: Industrial Engineering
Divisions: ?? journal_49_9_Volume-14-Nomor-04-August-2005 ??
Depositing User: Mr. Super Admin
Date Deposited: 30 May 2013 17:33
Last Modified: 03 Jun 2013 06:16
URI: http://eprints2.binus.ac.id/id/eprint/26689

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