ON-CHIP VACUUM GENERATED BY A MICROMACHINED KNUDSEN PUMP

McNamara, Shamus and B Gianchandani, Yogesh (2005) ON-CHIP VACUUM GENERATED BY A MICROMACHINED KNUDSEN PUMP. Journal of MIcroelectromechanical systems, 14 (04). ISSN 1057-7157

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Official URL: http://library.binus.ac.id/Collections/journal_det...
Item Type: Article
Additional Information: 9_Volume 14 / Nomor 04 / August 2005_ON-CHIP VACUUM GENERATED BY A MICROMACHINED KNUDSEN PUMP
Subjects: Industrial Engineering
Divisions: ?? journal_49_9_Volume-14-Nomor-04-August-2005 ??
Depositing User: Mr. Super Admin
Date Deposited: 30 May 2013 17:33
Last Modified: 03 Jun 2013 04:27
URI: http://eprints2.binus.ac.id/id/eprint/26701

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